Preparation and properties of reactive-sputtered amorphous CN~x films: Fid-Bau Portal

Preparation and properties of reactive-sputtered amorphous CN~x films

Takada, N. / Arai, K. / Nitta, S. / Nonomura, S.

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Preparation and properties of reactive-sputtered amorphous CN~x films

Takada, N. / Arai, K. / Nitta, S. / Nonomura, S.

Preparation and properties of reactive-sputtered amorphous CN~x films

Takada, N. / Arai, K. / Nitta, S. / Nonomura, S.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Preparation and properties of reactive-sputtered amorphous CN~x films

Contributors:

Takada, N. (author) / Arai, K. (author) / Nitta, S. (author) / Nonomura, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 113/114 ; 274-277

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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