The investigation of properties of silicon nitride films obtained by RPECVD from hexamethyldisilazane: Fid-Bau Portal

The investigation of properties of silicon nitride films obtained by RPECVD from hexamethyldisilazane

Fainer, N. I. / Rumyantsev, Y. M. / Kosinova, M. L. / Yurjev, G. S. / Maximovskii, E. A. / Kuznetsov, F. A.

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The investigation of properties of silicon nitride films obtained by RPECVD from hexamethyldisilazane

Fainer, N. I. / Rumyantsev, Y. M. / Kosinova, M. L. / Yurjev, G. S. / Maximovskii, E. A. / Kuznetsov, F. A.

The investigation of properties of silicon nitride films obtained by RPECVD from hexamethyldisilazane

Fainer, N. I. / Rumyantsev, Y. M. / Kosinova, M. L. / Yurjev, G. S. / Maximovskii, E. A. / Kuznetsov, F. A.

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Title:

The investigation of properties of silicon nitride films obtained by RPECVD from hexamethyldisilazane

Contributors:

Fainer, N. I. (author) / Rumyantsev, Y. M. (author) / Kosinova, M. L. (author) / Yurjev, G. S. (author) / Maximovskii, E. A. (author) / Kuznetsov, F. A. (author)

Published in:

APPLIED SURFACE SCIENCE ; 113/114 ; 614-617

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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