Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane: Fid-Bau Portal

Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane

Shayapov, V. R. / Rumyantsev, Y. M. / Dzyuba, A. A. / Ayupov, B. M. / Fainer, N. I.

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Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane

Shayapov, V. R. / Rumyantsev, Y. M. / Dzyuba, A. A. / Ayupov, B. M. / Fainer, N. I.

Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane

Shayapov, V. R. / Rumyantsev, Y. M. / Dzyuba, A. A. / Ayupov, B. M. / Fainer, N. I.

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Document information

Title:

Mechanical stresses in silicon carbonitride films obtained by PECVD from hexamethyldisilazane

Contributors:

Shayapov, V. R. (author) / Rumyantsev, Y. M. (author) / Dzyuba, A. A. (author) / Ayupov, B. M. (author) / Fainer, N. I. (author)

Published in:

APPLIED SURFACE SCIENCE ; 265 ; 385-388

Publication date:

2013-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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Fainer, N. I. / Rumyantsev, Y. M. / Kosinova, M. L. et al. | British Library Online Contents | 1997

Structural and optical properties of amorphous hydrogenated silicon carbonitride films produced by PECVD

Vassallo, E. / Cremona, A. / Ghezzi, F. et al. | British Library Online Contents | 2006

Mechanical properties of amorphous silicon carbonitride thin films at elevated temperatures

Ctvrtlik, R. / Al-Haik, M. S. / Kulikovsky, V. | British Library Online Contents | 2015

PECVD synthesis, optical and mechanical properties of silicon carbon nitride films

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