Microstructure evolution of hydrogenated silicon thin films at different hydrogen incorporation: Fid-Bau Portal

Microstructure evolution of hydrogenated silicon thin films at different hydrogen incorporation

Hwang, H. L. / Wang, K. C. / Hsu, K. C. / Wang, R. Y. / Yew, T. R. / Loferski, J. J.

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Microstructure evolution of hydrogenated silicon thin films at different hydrogen incorporation

Hwang, H. L. / Wang, K. C. / Hsu, K. C. / Wang, R. Y. / Yew, T. R. / Loferski, J. J.

Microstructure evolution of hydrogenated silicon thin films at different hydrogen incorporation

Hwang, H. L. / Wang, K. C. / Hsu, K. C. / Wang, R. Y. / Yew, T. R. / Loferski, J. J.

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Check availability in my library

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Document information

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Document information

Title:

Microstructure evolution of hydrogenated silicon thin films at different hydrogen incorporation

Contributors:

Hwang, H. L. (author) / Wang, K. C. (author) / Hsu, K. C. (author) / Wang, R. Y. (author) / Yew, T. R. (author) / Loferski, J. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 113/114 ; 741-749

Publication date:

1997-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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Diffusion and effusion analysis of hydrogen in undoped hydrogenated amorphous silicon thin films

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