Microstructure of thin films prepared by plasma-enhanced chemical vapour deposition of helium-diluted silane

Carabe, J. / Ganda, J.J. / Gonzalez, N. et al. | British Library Online Contents | 1999

Microstructure evolution of hydrogenated silicon thin films at different hydrogen incorporation

Hwang, H. L. / Wang, K. C. / Hsu, K. C. et al. | British Library Online Contents | 1997

Experimental Investigation of Microstructure and Piezoresistive Properties of Phosphorus-Doped Hydrogenated Nanocrystalline Silicon Thin Films Prepared by PECVD

Pan, H.B. / Ding, J.N. / Cheng, G.G. et al. | British Library Online Contents | 2014

Hydrogenated amorphous silicon-carbide thin films with high photo-sensitivity prepared by layer-by-layer hydrogen annealing technique

Li, S. X. / Cao, Y. Q. / Xu, J. et al. | British Library Online Contents | 2013

Characterization of hydrogenated nanocrystalline silicon thin films prepared with various negative direct current biases

Shim, J.-H. / Cho, N.-H. / Lee, E.-H. et al. | British Library Online Contents | 2008