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Mechanical Testing of Polysilicon Thin Films with the ISDGy

Yuan, B. / Sharpe, W. N.

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Mechanical Testing of Polysilicon Thin Films with the ISDGy

Yuan, B. / Sharpe, W. N.

Mechanical Testing of Polysilicon Thin Films with the ISDGy

Yuan, B. / Sharpe, W. N.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Mechanical Testing of Polysilicon Thin Films with the ISDGy

Contributors:

Yuan, B. (author) / Sharpe, W. N. (author)

Published in:

EXPERIMENTAL TECHNIQUES ; 21 ; 32-35

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0732-8818

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Overall elastic domain of thin polysilicon films

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Evaluation of Mechanical Properties and Strain Criterion for Realibility Design of Micromachined Polysilicon Thin Films

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