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Relating mechanical testing and microstructural features of polysilicon thin films

Jayaraman, S. / Edwards, R. L. / Hemker, K. J.

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Relating mechanical testing and microstructural features of polysilicon thin films

Jayaraman, S. / Edwards, R. L. / Hemker, K. J.

Relating mechanical testing and microstructural features of polysilicon thin films

Jayaraman, S. / Edwards, R. L. / Hemker, K. J.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Relating mechanical testing and microstructural features of polysilicon thin films

Contributors:

Jayaraman, S. (author) / Edwards, R. L. (author) / Hemker, K. J. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 688-697

Publication date:

1999-01-01

Size:

10 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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