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Size effect on the mechanical properties of microfabricated polysilicon thin films

Ding, J. N. / Meng, Y. G. / Wen, S. Z.

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Size effect on the mechanical properties of microfabricated polysilicon thin films

Ding, J. N. / Meng, Y. G. / Wen, S. Z.

Size effect on the mechanical properties of microfabricated polysilicon thin films

Ding, J. N. / Meng, Y. G. / Wen, S. Z.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Size effect on the mechanical properties of microfabricated polysilicon thin films

Contributors:

Ding, J. N. (author) / Meng, Y. G. (author) / Wen, S. Z. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 16 ; 2223-2228

Publication date:

2001-01-01

Size:

6 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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