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Damage induced in materials by ion implantation

Mathur, M. S. / McKee, J. S. C. / Liu, M. / He, D.

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Damage induced in materials by ion implantation

Mathur, M. S. / McKee, J. S. C. / Liu, M. / He, D.

Damage induced in materials by ion implantation

Mathur, M. S. / McKee, J. S. C. / Liu, M. / He, D.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Damage induced in materials by ion implantation

Contributors:

Mathur, M. S. (author) / McKee, J. S. C. (author) / Liu, M. (author) / He, D. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 45 ; 25-29

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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