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    Defect mapping in 4H-SiC wafers

    New search for: Yakimova, R.
    New search for: Yakimov, T.
    New search for: Hitova, L.
    New search for: Janzen, E.
    New search for: Camassel, J.
    New search for: Fricke, K.
    New search for: Krozer, V.
    New search for: Robert, J. L.

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    Defect mapping in 4H-SiC wafers

    New search for: Yakimova, R.
    New search for: Yakimov, T.
    New search for: Hitova, L.
    New search for: Janzen, E.
    New search for: Camassel, J.
    New search for: Fricke, K.
    New search for: Krozer, V.
    New search for: Robert, J. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Defect mapping in 4H-SiC wafers

    New search for: Yakimova, R.
    New search for: Yakimov, T.
    New search for: Hitova, L.
    New search for: Janzen, E.
    New search for: Camassel, J.
    New search for: Fricke, K.
    New search for: Krozer, V.
    New search for: Robert, J. L.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Defect mapping in 4H-SiC wafers

    Contributors:

    Yakimova, R. (author) / Yakimov, T. (author) / Hitova, L. (author) / Janzen, E. (author) / Camassel, J. / Fricke, K. / Krozer, V. / Robert, J. L.

    Published in:

    High Temperature Electronics: Materials, Devices and Applications ; 287-290

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 46

    Publication date:

    1997-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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