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Defect observation in SiC wafers by room-temperature photoluminescence mapping

Higashi, E. / Tajima, M. / Hoshino, N. / Hayashi, T. / Kinoshita, H. / Shiomi, H. / Matsumoto, S.

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Defect observation in SiC wafers by room-temperature photoluminescence mapping

Higashi, E. / Tajima, M. / Hoshino, N. / Hayashi, T. / Kinoshita, H. / Shiomi, H. / Matsumoto, S.

Defect observation in SiC wafers by room-temperature photoluminescence mapping

Higashi, E. / Tajima, M. / Hoshino, N. / Hayashi, T. / Kinoshita, H. / Shiomi, H. / Matsumoto, S.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Defect observation in SiC wafers by room-temperature photoluminescence mapping

Contributors:

Higashi, E. (author) / Tajima, M. (author) / Hoshino, N. (author) / Hayashi, T. (author) / Kinoshita, H. (author) / Shiomi, H. (author) / Matsumoto, S. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 53-57

Publication date:

2006-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

Hennessy, J. / Ryan, T. | British Library Online Contents | 2007

Characterization of SiC Wafers by Photoluminescence Mapping

Tajima, M. / Higashi, E. / Hayashi, T. et al. | British Library Online Contents | 2006

Defect mapping in 4H-SiC wafers

Yakimova, R. / Yakimov, T. / Hitova, L. et al. | British Library Online Contents | 1997

Nondestructive Analysis of Stacking Faults in 4H-SiC Bulk Wafers by Room-Temperature Photoluminescence Mapping under Deep UV Excitation

Hoshino, N. / Tajima, M. / Hayashi, T. et al. | British Library Online Contents | 2007

XRD and Photoluminescence Whole-Wafer Mapping of 4H-SiC Wafers

Ryan, T. / Hennessy, J. / Harrison, C. et al. | British Library Online Contents | 2007