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Resistivity Mapping of Semi-Insulating 6H-SiC Wafers

Roth, M. D. / Heydemann, V. D. / Mitchel, W. C. / Yushin, N. K. / Sharma, M. / Wang, S. / Balkas, C. M.

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Resistivity Mapping of Semi-Insulating 6H-SiC Wafers

Roth, M. D. / Heydemann, V. D. / Mitchel, W. C. / Yushin, N. K. / Sharma, M. / Wang, S. / Balkas, C. M.

Resistivity Mapping of Semi-Insulating 6H-SiC Wafers

Roth, M. D. / Heydemann, V. D. / Mitchel, W. C. / Yushin, N. K. / Sharma, M. / Wang, S. / Balkas, C. M.

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Order at Subito €

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Document information

Title:

Resistivity Mapping of Semi-Insulating 6H-SiC Wafers

Contributors:

Roth, M. D. (author) / Heydemann, V. D. (author) / Mitchel, W. C. (author) / Yushin, N. K. (author) / Sharma, M. (author) / Wang, S. (author) / Balkas, C. M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 135-138

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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