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Surface processing of silicon carbide substrates

Bakin, A. S. / Dorozhkin, S. I. / Bogachov, S. V. / Kazak-Kazakevich, A. Z. / Lyutetskaja, I. G. / Sazanov, A. P.

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Surface processing of silicon carbide substrates

Bakin, A. S. / Dorozhkin, S. I. / Bogachov, S. V. / Kazak-Kazakevich, A. Z. / Lyutetskaja, I. G. / Sazanov, A. P.

Surface processing of silicon carbide substrates

Bakin, A. S. / Dorozhkin, S. I. / Bogachov, S. V. / Kazak-Kazakevich, A. Z. / Lyutetskaja, I. G. / Sazanov, A. P.

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Document information

Title:

Surface processing of silicon carbide substrates

Contributors:

Bakin, A. S. (author) / Dorozhkin, S. I. (author) / Bogachov, S. V. (author) / Kazak-Kazakevich, A. Z. (author) / Lyutetskaja, I. G. (author) / Sazanov, A. P. (author) / Camassel, J. / Fricke, K. / Krozer, V. / Robert, J. L.

Published in:

High Temperature Electronics: Materials, Devices and Applications ; 370-373

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 46

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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