Anisotropy of chemical mechanical polishing in silicon carbide substrates: Fid-Bau Portal

Anisotropy of chemical mechanical polishing in silicon carbide substrates

Chen, X. F. / Xu, X. G. / Hu, X. B. / Li, J. / Jiang, S. Z. / Ning, L. N. / Wang, Y. M. / Jiang, M. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Anisotropy of chemical mechanical polishing in silicon carbide substrates

Chen, X. F. / Xu, X. G. / Hu, X. B. / Li, J. / Jiang, S. Z. / Ning, L. N. / Wang, Y. M. / Jiang, M. H.

Anisotropy of chemical mechanical polishing in silicon carbide substrates

Chen, X. F. / Xu, X. G. / Hu, X. B. / Li, J. / Jiang, S. Z. / Ning, L. N. / Wang, Y. M. / Jiang, M. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Anisotropy of chemical mechanical polishing in silicon carbide substrates

Contributors:

Chen, X. F. (author) / Xu, X. G. (author) / Hu, X. B. (author) / Li, J. (author) / Jiang, S. Z. (author) / Ning, L. N. (author) / Wang, Y. M. (author) / Jiang, M. H. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 142 ; 28-30

Publication date:

2007-01-01

Size:

3 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Li, C. / Wang, R. / Seiler, J. et al. | British Library Online Contents | 2004

Chemical mechanical polishing (CMP) anisotropy in sapphire

Zhu, H. / Tessaroto, L. A. / Sabia, R. et al. | British Library Online Contents | 2004

Effect of Anisotropy on Chemical Mechanical Polishing of LBO Crystal

Li, J. / Zhu, Y.W. / Zuo, D.W. et al. | British Library Online Contents | 2010

Silicon carbide atmosphere plasma polishing equipment and polishing method thereof

WU MINGYANG / LIANG FENGSHUANG / LIU LIFEI et al. | European Patent Office | 2022

Free access

Selectivity and Residual Damage of Colloidal Silica Chemi-Mechanical Polishing of Silicon Carbide

Grim, J. R. / Skowronski, M. / Everson, W. J. et al. | British Library Online Contents | 2006