Sputtering Preparation of Silicon Nitride Thin Films for Gate Dielectric Applications

Pereira, L. / Aguas, H. / Igreja, R. et al. | British Library Online Contents | 2004

Vertical Transistor with Ultrathin Silicon Nitride Gate Dielectric

Moradi, M. / Nathan, A. / Haverinen, H. M. et al. | British Library Online Contents | 2009

Chemical vapor deposition of silicon nitride thin films from tris(diethylamino)chlorosilane

Liu, X. / Pu, X. / Li, H. et al. | British Library Online Contents | 2005

Atomic-layer chemical-vapor-deposition of silicon-nitride

Morishita, S. / Sugahara, S. / Matsumura, M. | British Library Online Contents | 1997

Silicon Nitride as Top Gate Dielectric for Epitaxial Graphene

Wehrfritz, P. / Fromm, F. / Malzer, S. et al. | British Library Online Contents | 2013