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    Investigation of sputtered indium-tin oxide/silicon interfaces: ion damage, hydrogen passivation and low-temperature anneal

    New search for: Kuwano, K.
    New search for: Ashok, S.

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    Investigation of sputtered indium-tin oxide/silicon interfaces: ion damage, hydrogen passivation and low-temperature anneal

    New search for: Kuwano, K.
    New search for: Ashok, S.

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    Access via TIB
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    Investigation of sputtered indium-tin oxide/silicon interfaces: ion damage, hydrogen passivation and low-temperature anneal

    New search for: Kuwano, K.
    New search for: Ashok, S.

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Investigation of sputtered indium-tin oxide/silicon interfaces: ion damage, hydrogen passivation and low-temperature anneal

    Contributors:

    Kuwano, K. (author) / Ashok, S. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 117/118 ; 629-633

    Publication date:

    1997-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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