Formation of metal disilicide layers contacting ion beam-synthesized, buried 3C-SiC layers in silicon

Lindner, J. K. / Wenzel, S. / Stritzker, B. | British Library Online Contents | 2001

Ion Beam Induced Epitaxial Crystallization of Buried SiC Layers in Silicon

Lindner, J. K. N. / Volz, K. / Stritzker, B. | British Library Online Contents | 1997

Ion beam synthesis of buried CdSe nanocrystallites in SiO2 on (100)-silicon

Karl, H. / Hipp, W. / Grohans, I. et al. | British Library Online Contents | 2002

Features of buried dielectric layers: ion beam synthesis in silicon by a high temperature sequential oxygen and nitrogen implantation with substoichiometric doses

Charnyi, L. A. / Danilin, A. B. / Drakin, K. A. et al. | British Library Online Contents | 1992

Composition analysis of oxidized buried SiC layers in silicon from EFTEM images

Attenberger, W. / Lindner, J. K. / Schmid, M. et al. | British Library Online Contents | 2001