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Atomic force microscopy investigations of rapid thermal carbonized silicon

Romanus, H. / Cimalla, V. / Kromka, A. / Scheiner, J. / Spiess, L. / Pezoldt, J.

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Atomic force microscopy investigations of rapid thermal carbonized silicon

Romanus, H. / Cimalla, V. / Kromka, A. / Scheiner, J. / Spiess, L. / Pezoldt, J.

Atomic force microscopy investigations of rapid thermal carbonized silicon

Romanus, H. / Cimalla, V. / Kromka, A. / Scheiner, J. / Spiess, L. / Pezoldt, J.

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Document information

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Document information

Title:

Atomic force microscopy investigations of rapid thermal carbonized silicon

Contributors:

Romanus, H. (author) / Cimalla, V. (author) / Kromka, A. (author) / Scheiner, J. (author) / Spiess, L. (author) / Pezoldt, J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 47 ; 274-278

Publication date:

1997-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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