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Local cross-sectional profiling of multilayer thin films with an atomic force microscope for layer thickness determination

LaGraff, J. R. / Murduck, J. M.

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Local cross-sectional profiling of multilayer thin films with an atomic force microscope for layer thickness determination

LaGraff, J. R. / Murduck, J. M.

Local cross-sectional profiling of multilayer thin films with an atomic force microscope for layer thickness determination

LaGraff, J. R. / Murduck, J. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Local cross-sectional profiling of multilayer thin films with an atomic force microscope for layer thickness determination

Contributors:

LaGraff, J. R. (author) / Murduck, J. M. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 12 ; 1935-1938

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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