Tilt-axis effect on oxidation behaviour and capacitance-voltage characteristics of (100) silicon: Fid-Bau Portal

Tilt-axis effect on oxidation behaviour and capacitance-voltage characteristics of (100) silicon

Woo, H. J. / Choi, D. J. / Kim, G. H.

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Tilt-axis effect on oxidation behaviour and capacitance-voltage characteristics of (100) silicon

Woo, H. J. / Choi, D. J. / Kim, G. H.

Tilt-axis effect on oxidation behaviour and capacitance-voltage characteristics of (100) silicon

Woo, H. J. / Choi, D. J. / Kim, G. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Tilt-axis effect on oxidation behaviour and capacitance-voltage characteristics of (100) silicon

Contributors:

Woo, H. J. (author) / Choi, D. J. (author) / Kim, G. H. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 32 ; 6101-6106

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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