A Comparative Study of High-Temperature Aluminum Post-Implantation Annealing in 6H- and 4H-SiC, Non-Uniform Temperature Effects: Fid-Bau Portal

A Comparative Study of High-Temperature Aluminum Post-Implantation Annealing in 6H- and 4H-SiC, Non-Uniform Temperature Effects

Lazar, M. / Raynaud, C. / Planson, D. / Locatelli, M.-L. / Isoird, K. / Ottaviani, L. / Chante, J. P. / Nipoti, R. / Poggi, A. / Cardinali, G.

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A Comparative Study of High-Temperature Aluminum Post-Implantation Annealing in 6H- and 4H-SiC, Non-Uniform Temperature Effects

Lazar, M. / Raynaud, C. / Planson, D. / Locatelli, M.-L. / Isoird, K. / Ottaviani, L. / Chante, J. P. / Nipoti, R. / Poggi, A. / Cardinali, G.

A Comparative Study of High-Temperature Aluminum Post-Implantation Annealing in 6H- and 4H-SiC, Non-Uniform Temperature Effects

Lazar, M. / Raynaud, C. / Planson, D. / Locatelli, M.-L. / Isoird, K. / Ottaviani, L. / Chante, J. P. / Nipoti, R. / Poggi, A. / Cardinali, G.

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Title:

A Comparative Study of High-Temperature Aluminum Post-Implantation Annealing in 6H- and 4H-SiC, Non-Uniform Temperature Effects

Contributors:

Lazar, M. (author) / Raynaud, C. (author) / Planson, D. (author) / Locatelli, M.-L. (author) / Isoird, K. (author) / Ottaviani, L. (author) / Chante, J. P. (author) / Nipoti, R. (author) / Poggi, A. (author) / Cardinali, G. (author)

Published in:

MATERIALS SCIENCE FORUM ; 389/393 ; 827-830

Publication date:

2002-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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