Post-Implantation Annealing Effects on the Surface Morphology and Electrical Characteristics of 6H-SiC Implanted with Aluminum

Ohi, A. / Ohshima, T. / Yoshikawa, M. et al. | British Library Online Contents | 2002

Post-Implantation Annealing of SiC: Relevance of the Heating Rate

Nipoti, R. | British Library Online Contents | 2007

A new encapsulation method of InP during post implantation annealing

Kadoun, A. / Tardy, J. / Thomas, I. et al. | British Library Online Contents | 1993

Post-Implantation Annealing in a Silane Ambient Using Hot-Wall CVD

Rao, S. P. / Bergamini, F. / Nipoti, R. et al. | British Library Online Contents | 2006

A Comparative Study of High-Temperature Aluminum Post-Implantation Annealing in 6H- and 4H-SiC, Non-Uniform Temperature Effects

Lazar, M. / Raynaud, C. / Planson, D. et al. | British Library Online Contents | 2002