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    Metal-Nitride-Semiconductor Capacitors on 6H-SiC

    New search for: Berberich, S.
    New search for: Godignon, P.
    New search for: Millan, J.
    New search for: Planson, D.
    New search for: Hartnagel, H. L.
    New search for: Senes, A.

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    Metal-Nitride-Semiconductor Capacitors on 6H-SiC

    New search for: Berberich, S.
    New search for: Godignon, P.
    New search for: Millan, J.
    New search for: Planson, D.
    New search for: Hartnagel, H. L.
    New search for: Senes, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Metal-Nitride-Semiconductor Capacitors on 6H-SiC

    New search for: Berberich, S.
    New search for: Godignon, P.
    New search for: Millan, J.
    New search for: Planson, D.
    New search for: Hartnagel, H. L.
    New search for: Senes, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Metal-Nitride-Semiconductor Capacitors on 6H-SiC

    Contributors:

    Berberich, S. (author) / Godignon, P. (author) / Millan, J. (author) / Planson, D. (author) / Hartnagel, H. L. (author) / Senes, A. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 264/268 ; 881-884

    Publication date:

    1998-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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