Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD - Temperature Dependence

    New search for: Wu, C.-H.
    New search for: Fleischman, A. J.
    New search for: Zorman, C. A.
    New search for: Mehregany, M.
    New search for: Pensl, G.
    New search for: Morkoc, H.
    New search for: Monemar, B.
    New search for: Janzen, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD - Temperature Dependence

    New search for: Wu, C.-H.
    New search for: Fleischman, A. J.
    New search for: Zorman, C. A.
    New search for: Mehregany, M.
    New search for: Pensl, G.
    New search for: Morkoc, H.
    New search for: Monemar, B.
    New search for: Janzen, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD - Temperature Dependence

    New search for: Wu, C.-H.
    New search for: Fleischman, A. J.
    New search for: Zorman, C. A.
    New search for: Mehregany, M.
    New search for: Pensl, G.
    New search for: Morkoc, H.
    New search for: Monemar, B.
    New search for: Janzen, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Growth and Characterization of SiC Films on Large-Area Si Wafers by APCVD - Temperature Dependence

    Contributors:

    Wu, C.-H. (author) / Fleischman, A. J. (author) / Zorman, C. A. (author) / Mehregany, M. (author) / Pensl, G. / Morkoc, H. / Monemar, B. / Janzen, E.

    Published in:

    Silicon Carbide, III-Nitrides and Related Materials ; 179-182

    MATERIALS SCIENCE FORUM ; 264/268

    Publication date:

    1998-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Large-area SnO2: F thin films by offline APCVD

    Wang, Y. / Wu, Y. / Qin, Y. et al. | British Library Online Contents | 2011

    Photoluminescence of SnO~2 Films Prepared by APCVD

    Ji, F. / Ma, J. / Wang, Y. et al. | British Library Online Contents | 2005

    Iridium catalyzed growth of vertically aligned CNTs by APCVD

    Sahoo, R. K. / Jacob, C. | British Library Online Contents | 2014

    Novel Polycrystalline SiC Films Containing Nanoscale Through-Pores by Selective APCVD

    Chen, L. / Fu, X. A. / Zorman, C. A. et al. | British Library Online Contents | 2006

    Direct Growth of SiC Nanorods on Si Using APCVD and Single Precursors

    Rho, D. / Kim, J. S. / Byun, D. J. et al. | British Library Online Contents | 2004

    Back to top