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Donor Centers in Er-Implanted Silicon

Emtsev, V. V. / Andreev, B. A. / Poloskin, D. S. / Sobolev, N. A. / Shek, E. I.

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Donor Centers in Er-Implanted Silicon

Emtsev, V. V. / Andreev, B. A. / Poloskin, D. S. / Sobolev, N. A. / Shek, E. I.

Donor Centers in Er-Implanted Silicon

Emtsev, V. V. / Andreev, B. A. / Poloskin, D. S. / Sobolev, N. A. / Shek, E. I.

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Document information

Title:

Donor Centers in Er-Implanted Silicon

Contributors:

Emtsev, V. V. (author) / Andreev, B. A. (author) / Poloskin, D. S. (author) / Sobolev, N. A. (author) / Shek, E. I. (author) / Davies, G. / Nazare, M. H.

Published in:

Defects in Semiconductors ICDS-19 ; 1515-1520

MATERIALS SCIENCE FORUM ; 258/263

Publication date:

1997-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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