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    Effects of oxygen coimplantation on the formation of donor centers in erbium-implanted silicon

    New search for: Emtsev Jr, V. V.
    New search for: Poloskin, D. S.
    New search for: Shek, E. I.
    New search for: Sobolev, N. A.
    New search for: Kimerling, L. C.

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    Effects of oxygen coimplantation on the formation of donor centers in erbium-implanted silicon

    New search for: Emtsev Jr, V. V.
    New search for: Poloskin, D. S.
    New search for: Shek, E. I.
    New search for: Sobolev, N. A.
    New search for: Kimerling, L. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effects of oxygen coimplantation on the formation of donor centers in erbium-implanted silicon

    New search for: Emtsev Jr, V. V.
    New search for: Poloskin, D. S.
    New search for: Shek, E. I.
    New search for: Sobolev, N. A.
    New search for: Kimerling, L. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Effects of oxygen coimplantation on the formation of donor centers in erbium-implanted silicon

    Contributors:

    Emtsev Jr, V. V. (author) / Poloskin, D. S. (author) / Shek, E. I. (author) / Sobolev, N. A. (author) / Kimerling, L. C. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 81 ; 74 - 76

    Publication date:

    2001-01-01

    Size:

    3 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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