Characterization of Single Crystal Epitaxial Aluminum Nitride Thin Films on Sapphire, Silicon Carbide and Silicon Substrates by X-Ray Double Crystal Diffractometry and Transmission Electron Microscopy: Fid-Bau Portal

Characterization of Single Crystal Epitaxial Aluminum Nitride Thin Films on Sapphire, Silicon Carbide and Silicon Substrates by X-Ray Double Crystal Diffractometry and Transmission Electron Microscopy

Chaudhuri, J. / Thokala, R. / Edgar, J. H. / Sywe, B. S.

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Chaudhuri, J. / Thokala, R. / Edgar, J. H. / Sywe, B. S.

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Title:

Contributors:

Chaudhuri, J. (author) / Thokala, R. (author) / Edgar, J. H. (author) / Sywe, B. S. (author)

Published in:

ADVANCES IN X RAY ANALYSIS ; 645-652

Publication date:

1997-01-01

Size:

8 pages

ISSN:

0376-0308

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 539.7222

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