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Electric force microscopy as a probe of active and passive elements of integrated circuits

Karpov, I. / Belcher, R. W. / Linn, J. H.

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Electric force microscopy as a probe of active and passive elements of integrated circuits

Karpov, I. / Belcher, R. W. / Linn, J. H.

Electric force microscopy as a probe of active and passive elements of integrated circuits

Karpov, I. / Belcher, R. W. / Linn, J. H.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

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Document information

Title:

Electric force microscopy as a probe of active and passive elements of integrated circuits

Contributors:

Karpov, I. (author) / Belcher, R. W. (author) / Linn, J. H. (author)

Published in:

APPLIED SURFACE SCIENCE ; 125 ; 332-338

Publication date:

1998-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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