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Crystal Texture and Electromigration Damage in Al-Based Interconnect Lines Studied by ACOM with the SEM
Crystal Texture and Electromigration Damage in Al-Based Interconnect Lines Studied by ACOM with the SEM
Crystal Texture and Electromigration Damage in Al-Based Interconnect Lines Studied by ACOM with the SEM
Lepper, M. (author) / Von Glasow, A. (author) / Piscevic, D. (author) / Schwarzer, R. A. (author)
MATERIALS SCIENCE FORUM ; 273/275 ; 573-578
1998-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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