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Quantitative analysis of electromigration damage in Al-based conductor lines

Kraft, O. / Sanchez, J. E. / Bauer, M. / Arzt, E.

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Quantitative analysis of electromigration damage in Al-based conductor lines

Kraft, O. / Sanchez, J. E. / Bauer, M. / Arzt, E.

Quantitative analysis of electromigration damage in Al-based conductor lines

Kraft, O. / Sanchez, J. E. / Bauer, M. / Arzt, E.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Quantitative analysis of electromigration damage in Al-based conductor lines

Contributors:

Kraft, O. (author) / Sanchez, J. E. (author) / Bauer, M. (author) / Arzt, E. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 12 ; 2027-2037

Publication date:

1997-01-01

Size:

11 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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