Nitride-molecule synthesis in plasma produced by reactive laser ablation assisted by RF discharge for thin-film deposition: Fid-Bau Portal

Nitride-molecule synthesis in plasma produced by reactive laser ablation assisted by RF discharge for thin-film deposition

Vivien, C. / Dinescu, M. / Meheust, P. / Boulmer-Leborgne, C. / Caricato, A. P. / Perriere, J.

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Nitride-molecule synthesis in plasma produced by reactive laser ablation assisted by RF discharge for thin-film deposition

Vivien, C. / Dinescu, M. / Meheust, P. / Boulmer-Leborgne, C. / Caricato, A. P. / Perriere, J.

Nitride-molecule synthesis in plasma produced by reactive laser ablation assisted by RF discharge for thin-film deposition

Vivien, C. / Dinescu, M. / Meheust, P. / Boulmer-Leborgne, C. / Caricato, A. P. / Perriere, J.

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Check availability in my library

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Document information

Title:

Nitride-molecule synthesis in plasma produced by reactive laser ablation assisted by RF discharge for thin-film deposition

Contributors:

Vivien, C. (author) / Dinescu, M. (author) / Meheust, P. (author) / Boulmer-Leborgne, C. (author) / Caricato, A. P. (author) / Perriere, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 127-129 ; 668-673

Publication date:

1998-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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