XPS studies of copper deposition from 1,5-cyclooctadiene-copper(I)-hexafluoroacetylacetonate on Si(111): Fid-Bau Portal

XPS studies of copper deposition from 1,5-cyclooctadiene-copper(I)-hexafluoroacetylacetonate on Si(111)

Cheng, T. Q. / Griffiths, K. / Norton, P. R. / Puddephatt, R. J.

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XPS studies of copper deposition from 1,5-cyclooctadiene-copper(I)-hexafluoroacetylacetonate on Si(111)

Cheng, T. Q. / Griffiths, K. / Norton, P. R. / Puddephatt, R. J.

XPS studies of copper deposition from 1,5-cyclooctadiene-copper(I)-hexafluoroacetylacetonate on Si(111)

Cheng, T. Q. / Griffiths, K. / Norton, P. R. / Puddephatt, R. J.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

XPS studies of copper deposition from 1,5-cyclooctadiene-copper(I)-hexafluoroacetylacetonate on Si(111)

Contributors:

Cheng, T. Q. (author) / Griffiths, K. (author) / Norton, P. R. (author) / Puddephatt, R. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 126 ; 303-308

Publication date:

1998-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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Selectivity in low pressure chemical vapor deposition of copper from hexafluoroacetylacetonate-copper(I)-trimethylvinyl-silane in the presence of water

Stumm, T. H. / Van den Bergh, H. | British Library Online Contents | 1994

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