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    Comparison of (hexafluoroacetylacetonate)Cu(vinyltrimethyl-silane) and (hexafluoroacetylacetonate)Cu(allyltrimethylsilane) for metalorganic chemical vapor deposition of copper

    New search for: Park, M.-Y.
    New search for: Son, J.-H.
    New search for: Kang, S.-W.
    New search for: Rhee, S.-W.

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    Comparison of (hexafluoroacetylacetonate)Cu(vinyltrimethyl-silane) and (hexafluoroacetylacetonate)Cu(allyltrimethylsilane) for metalorganic chemical vapor deposition of copper

    New search for: Park, M.-Y.
    New search for: Son, J.-H.
    New search for: Kang, S.-W.
    New search for: Rhee, S.-W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Comparison of (hexafluoroacetylacetonate)Cu(vinyltrimethyl-silane) and (hexafluoroacetylacetonate)Cu(allyltrimethylsilane) for metalorganic chemical vapor deposition of copper

    New search for: Park, M.-Y.
    New search for: Son, J.-H.
    New search for: Kang, S.-W.
    New search for: Rhee, S.-W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Comparison of (hexafluoroacetylacetonate)Cu(vinyltrimethyl-silane) and (hexafluoroacetylacetonate)Cu(allyltrimethylsilane) for metalorganic chemical vapor deposition of copper

    Contributors:

    Park, M.-Y. (author) / Son, J.-H. (author) / Kang, S.-W. (author) / Rhee, S.-W. (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 14 ; 975-979

    Publication date:

    1999-01-01

    Size:

    5 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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