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A platform for research: civil engineering, architecture and urbanism
Structure of Reactively Sputtered Ta-N-O Films
Structure of Reactively Sputtered Ta-N-O Films
Structure of Reactively Sputtered Ta-N-O Films
Mattern, N. (author) / Stavrev, M. (author) / Fischer, D. (author)
MATERIALS SCIENCE FORUM ; 278/281 ; 466-471
1998-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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