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Stress stability and thermo-mechanical properties of reactively sputtered alumina films
Stress stability and thermo-mechanical properties of reactively sputtered alumina films
Stress stability and thermo-mechanical properties of reactively sputtered alumina films
Hughey, M. P. (author) / Cook, R. F. (author) / Thurn, J. (author)
JOURNAL OF MATERIALS SCIENCE ; 40 ; 6345-6355
2005-01-01
11 pages
Article (Journal)
English
DDC:
620.11
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