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Texture evolution in Si/SiC layered structures deposited on Si(001) by chemical vapor deposition
Texture evolution in Si/SiC layered structures deposited on Si(001) by chemical vapor deposition
Texture evolution in Si/SiC layered structures deposited on Si(001) by chemical vapor deposition
Bjoerketun, L.-O. (author) / Hultman, L. (author) / Kordina, O. (author) / Sundgren, J.-E. (author)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 13 ; 2632-2642
1998-01-01
11 pages
Article (Journal)
English
DDC:
620.11
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