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    Influence of TaCl5 partial pressure on texture structure of TaC coating deposited by chemical vapor deposition

    New search for: Chen, Z. K.
    New search for: Xiong, X.
    New search for: Long, Y.

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    Influence of TaCl5 partial pressure on texture structure of TaC coating deposited by chemical vapor deposition

    New search for: Chen, Z. K.
    New search for: Xiong, X.
    New search for: Long, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of TaCl5 partial pressure on texture structure of TaC coating deposited by chemical vapor deposition

    New search for: Chen, Z. K.
    New search for: Xiong, X.
    New search for: Long, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Influence of TaCl5 partial pressure on texture structure of TaC coating deposited by chemical vapor deposition

    Contributors:

    Chen, Z. K. (author) / Xiong, X. (author) / Long, Y. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 257 ; 4044-4050

    Publication date:

    2011-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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