Diffusion Barrier Performance of Thin Cr Films in the Cu/Cr/Si Structure: Fid-Bau Portal

Diffusion Barrier Performance of Thin Cr Films in the Cu/Cr/Si Structure

Ezer, Y. / Haerkoenen, J. / Sokolov, V. / Saarilahti, J. / Kaitila, J. / Kuivalainen, P.

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Diffusion Barrier Performance of Thin Cr Films in the Cu/Cr/Si Structure

Ezer, Y. / Haerkoenen, J. / Sokolov, V. / Saarilahti, J. / Kaitila, J. / Kuivalainen, P.

Diffusion Barrier Performance of Thin Cr Films in the Cu/Cr/Si Structure

Ezer, Y. / Haerkoenen, J. / Sokolov, V. / Saarilahti, J. / Kaitila, J. / Kuivalainen, P.

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Title:

Diffusion Barrier Performance of Thin Cr Films in the Cu/Cr/Si Structure

Contributors:

Ezer, Y. (author) / Haerkoenen, J. (author) / Sokolov, V. (author) / Saarilahti, J. (author) / Kaitila, J. (author) / Kuivalainen, P. (author)

Published in:

MATERIALS RESEARCH BULLETIN ; 33 ; 1331-1338

Publication date:

1998-01-01

Size:

8 pages

ISSN:

0025-5408

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11 / 620

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