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Diffusion Barrier Performance of Thin Cr Films in the Cu/Cr/Si Structure
Diffusion Barrier Performance of Thin Cr Films in the Cu/Cr/Si Structure
Diffusion Barrier Performance of Thin Cr Films in the Cu/Cr/Si Structure
Ezer, Y. (Autor:in) / Haerkoenen, J. (Autor:in) / Sokolov, V. (Autor:in) / Saarilahti, J. (Autor:in) / Kaitila, J. (Autor:in) / Kuivalainen, P. (Autor:in)
MATERIALS RESEARCH BULLETIN ; 33 ; 1331-1338
01.01.1998
8 pages
Aufsatz (Zeitschrift)
Englisch
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