A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Effect of Si target sputtering power on diffusion barrier properties of Ta-Si-N thin films
Effect of Si target sputtering power on diffusion barrier properties of Ta-Si-N thin films
Effect of Si target sputtering power on diffusion barrier properties of Ta-Si-N thin films
Zhou, J.C. (author) / Liu, Z. (author) / Li, Y.Z. (author) / Luo, D.T. (author)
MATERIALS SCIENCE AND TECHNOLOGY -LONDON- ; 25 ; 419-424
2009-01-01
6 pages
Article (Journal)
English
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Deposition of SmS Optical Thin Films by Double-Target Sputtering
| British Library Online Contents | 2004
SPUTTERING TARGET METHOD FOR MANUFACTURING SPUTTERING TARGET AND METHOD FOR FORMING THIN FILM
European Patent Office | 2022
Sputtering target, method for manufacturing sputtering target, and method for forming thin film
| European Patent Office | 2021
| European Patent Office | 2024
| European Patent Office | 2017