Copper diffusion barrier performance of amorphous Ta-Ni thin films: Fid-Bau Portal

Copper diffusion barrier performance of amorphous Ta-Ni thin films

Yan, H. / Tay, Y. Y. / Jiang, Y. / Yantara, N. / Pan, J. / Liang, M. H. / Chen, Z.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Copper diffusion barrier performance of amorphous Ta-Ni thin films

Yan, H. / Tay, Y. Y. / Jiang, Y. / Yantara, N. / Pan, J. / Liang, M. H. / Chen, Z.

Copper diffusion barrier performance of amorphous Ta-Ni thin films

Yan, H. / Tay, Y. Y. / Jiang, Y. / Yantara, N. / Pan, J. / Liang, M. H. / Chen, Z.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Copper diffusion barrier performance of amorphous Ta-Ni thin films

Contributors:

Yan, H. (author) / Tay, Y. Y. (author) / Jiang, Y. (author) / Yantara, N. (author) / Pan, J. (author) / Liang, M. H. (author) / Chen, Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 258 ; 3158-3162

Publication date:

2012-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Ezer, Y. / Haerkoenen, J. / Sokolov, V. et al. | British Library Online Contents | 1998

Diffusion barrier properties of ionized metal plasma deposited tantalum nitride thin films between copper and silicon dioxide

Latt, K. M. / Lee, Y. K. / Seng, H. L. et al. | British Library Online Contents | 2001

Barrier performance of ultrathin amorphous Nb–Ni film between copper and silicon

Dai, X. H. / Zhang, L. / Feng, Z. D. et al. | British Library Online Contents | 2015

Ternary amorphous metallic thin films as diffusion barriers for Cu metallization

Nicolet, M.-A. | British Library Online Contents | 1996

The Texture and Property of Diffusion Barrier of TiN Thin Films

Sung, D. Y. / Kim, I. / Lee, M. G. et al. | British Library Online Contents | 2005