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Structural morphology and characterization of (AlCrMoTaTi)N coating deposited via magnetron sputtering
Structural morphology and characterization of (AlCrMoTaTi)N coating deposited via magnetron sputtering
Structural morphology and characterization of (AlCrMoTaTi)N coating deposited via magnetron sputtering
Tsai, D. C. (author) / Chang, Z. C. (author) / Kuo, B. H. (author) / Shiao, M. H. (author) / Chang, S. Y. (author) / Shieu, F. S. (author)
APPLIED SURFACE SCIENCE ; 282 ; 789-797
2013-01-01
9 pages
Article (Journal)
English
DDC:
621.35
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