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    Piezoelectric aluminum nitride thin films for microelectromechanical systems

    New search for: Piazza, G.
    New search for: Felmetsger, V.
    New search for: Muralt, P.
    New search for: Olsson, R.H.
    New search for: Ruby, R.

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    Piezoelectric aluminum nitride thin films for microelectromechanical systems

    New search for: Piazza, G.
    New search for: Felmetsger, V.
    New search for: Muralt, P.
    New search for: Olsson, R.H.
    New search for: Ruby, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Piezoelectric aluminum nitride thin films for microelectromechanical systems

    New search for: Piazza, G.
    New search for: Felmetsger, V.
    New search for: Muralt, P.
    New search for: Olsson, R.H.
    New search for: Ruby, R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Piezoelectric aluminum nitride thin films for microelectromechanical systems

    Contributors:

    Piazza, G. (author) / Felmetsger, V. (author) / Muralt, P. (author) / Olsson, R.H. (author) / Ruby, R. (author)

    Published in:

    MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 37 ; 1051

    Publication date:

    2012-01-01

    Size:

    1051 pages

    ISSN:

    0883-7694

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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