Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates: Fid-Bau Portal

Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates

Ye, M. / Berton, G. / Delplancke, J. L. / Delplancke, M. P. / Segers, L. / Winand, R. / De Bruyn, K.

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Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates

Ye, M. / Berton, G. / Delplancke, J. L. / Delplancke, M. P. / Segers, L. / Winand, R. / De Bruyn, K.

Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates

Ye, M. / Berton, G. / Delplancke, J. L. / Delplancke, M. P. / Segers, L. / Winand, R. / De Bruyn, K.

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Title:

Residual Stress Evolution by the ex-situ Annealing of TiN Thin Films Deposited on Steel Substrates

Contributors:

Ye, M. (author) / Berton, G. (author) / Delplancke, J. L. (author) / Delplancke, M. P. (author) / Segers, L. (author) / Winand, R. (author) / De Bruyn, K. (author)

Published in:

MATERIALS SCIENCE FORUM ; 287/288 ; 275-280

Publication date:

1998-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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