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    Shallow junction doping technologies for ULSI

    New search for: Jones, E. C.
    New search for: Ishida, E.

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    Shallow junction doping technologies for ULSI

    New search for: Jones, E. C.
    New search for: Ishida, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Shallow junction doping technologies for ULSI

    New search for: Jones, E. C.
    New search for: Ishida, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Shallow junction doping technologies for ULSI

    Contributors:

    Jones, E. C. (author) / Ishida, E. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- R REPORTS- ; 24 ; 1-80

    Publication date:

    1998-01-01

    Size:

    80 pages

    ISSN:

    0927-796X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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