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Simulation of a vertical reactor for high pressure organometallic chemical vapor deposition

Kepler, G. M. / Hopfner, C. / Scroggs, J. S. / Bachmann, K. J.

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Simulation of a vertical reactor for high pressure organometallic chemical vapor deposition

Kepler, G. M. / Hopfner, C. / Scroggs, J. S. / Bachmann, K. J.

Simulation of a vertical reactor for high pressure organometallic chemical vapor deposition

Kepler, G. M. / Hopfner, C. / Scroggs, J. S. / Bachmann, K. J.

Access

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Simulation of a vertical reactor for high pressure organometallic chemical vapor deposition

Contributors:

Kepler, G. M. (author) / Hopfner, C. (author) / Scroggs, J. S. (author) / Bachmann, K. J. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 57 ; 11-19

Publication date:

1998-01-01

Size:

9 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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