Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Transport phenomena in a slim vertical atmospheric pressure chemical vapor deposition reactor utilizing natural convection

    New search for: Yamada, Ayami
    New search for: Li, Ning
    New search for: Matsuo, Miya
    New search for: Muroi, Mitsuko
    New search for: Habuka, Hitoshi
    New search for: Ishida, Yuuki
    New search for: Ikeda, Shin-Ichi
    New search for: Hara, Shiro

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Transport phenomena in a slim vertical atmospheric pressure chemical vapor deposition reactor utilizing natural convection

    New search for: Yamada, Ayami
    New search for: Li, Ning
    New search for: Matsuo, Miya
    New search for: Muroi, Mitsuko
    New search for: Habuka, Hitoshi
    New search for: Ishida, Yuuki
    New search for: Ikeda, Shin-Ichi
    New search for: Hara, Shiro

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Transport phenomena in a slim vertical atmospheric pressure chemical vapor deposition reactor utilizing natural convection

    New search for: Yamada, Ayami
    New search for: Li, Ning
    New search for: Matsuo, Miya
    New search for: Muroi, Mitsuko
    New search for: Habuka, Hitoshi
    New search for: Ishida, Yuuki
    New search for: Ikeda, Shin-Ichi
    New search for: Hara, Shiro

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Transport phenomena in a slim vertical atmospheric pressure chemical vapor deposition reactor utilizing natural convection

    Contributors:

    Yamada, Ayami (author) / Li, Ning (author) / Matsuo, Miya (author) / Muroi, Mitsuko (author) / Habuka, Hitoshi (author) / Ishida, Yuuki (author) / Ikeda, Shin-Ichi (author) / Hara, Shiro (author)

    Published in:

    Materials science in semiconductor processing ; 71 ; 348-351

    Publication date:

    2017-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Transport phenomena in a slim vertical atmospheric pressure chemical vapor deposition reactor utilizing natural convection

    Yamada, Ayami / Li, Ning / Matsuo, Miya et al. | British Library Online Contents | 2017

    Transport phenomena in a slim vertical atmospheric pressure chemical vapor deposition reactor utilizing natural convection

    Yamada, Ayami / Li, Ning / Matsuo, Miya et al. | British Library Online Contents | 2017

    Simulation of a vertical reactor for high pressure organometallic chemical vapor deposition

    Kepler, G. M. / Hopfner, C. / Scroggs, J. S. et al. | British Library Online Contents | 1998

    Modeling of silicon carbide chemical vapor deposition in a vertical reactor

    Vorob'ev, A.N. / Egorov, Y.E. / Makarov, Y.N. et al. | British Library Online Contents | 1999

    Atmospheric pressure chemical vapor deposition of titanium dioxide films from TiCl4

    Arvan, B. / Khakifirooz, A. / Tarighat, R. et al. | British Library Online Contents | 2004

    Back to top