Organometallic chemical vapor deposition of compound semiconductors: Fid-Bau Portal

Organometallic chemical vapor deposition of compound semiconductors

Grassi, M. / Soares, D. A. / de Queiroz, A. A. / Bressiani, A. H. / Bressiani, J. C.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Organometallic chemical vapor deposition of compound semiconductors

Grassi, M. / Soares, D. A. / de Queiroz, A. A. / Bressiani, A. H. / Bressiani, J. C.

Organometallic chemical vapor deposition of compound semiconductors

Grassi, M. / Soares, D. A. / de Queiroz, A. A. / Bressiani, A. H. / Bressiani, J. C.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Organometallic chemical vapor deposition of compound semiconductors

Contributors:

Grassi, M. (author) / Soares, D. A. (author) / de Queiroz, A. A. (author) / Bressiani, A. H. (author) / Bressiani, J. C. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 112 ; 179-181

Publication date:

2004-01-01

Size:

3 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Kepler, G. M. / Hopfner, C. / Scroggs, J. S. et al. | British Library Online Contents | 1998

Organometallic Compounds as Precursors for Chemical Vapor Deposition of Thin Films of Inorganic Materials

Zanella, P. / Battiston, G. A. / Carta, G. et al. | British Library Online Contents | 1998

Tungsten deposition by organometallic chemical vapour deposition with organotungsten precursors

Spee, C. I. M. A. / Verbeek, F. / Kraaijkamp, J. G. et al. | British Library Online Contents | 1993

Organometallic Vapor Phase Epitaxy (OMVPE)

Breiland, W. G. / Coltrin, M. E. / Creighton, J. R. et al. | British Library Online Contents | 1999

4547404 Chemical vapor deposition process

Elsevier | 1987