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Influence of substrate nature on the microstructure of LPCVD silicon films
Influence of substrate nature on the microstructure of LPCVD silicon films
Influence of substrate nature on the microstructure of LPCVD silicon films
Caussat, B. (author) / Couderc, J. P. (author) / Scheid, E. (author) / Bourgerette, C. (author) / De Mauduit, B. (author)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 17 ; 1899-1902
1998-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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