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    Influence of substrate nature on the microstructure of LPCVD silicon films

    New search for: Caussat, B.
    New search for: Couderc, J. P.
    New search for: Scheid, E.
    New search for: Bourgerette, C.
    New search for: De Mauduit, B.

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    Influence of substrate nature on the microstructure of LPCVD silicon films

    New search for: Caussat, B.
    New search for: Couderc, J. P.
    New search for: Scheid, E.
    New search for: Bourgerette, C.
    New search for: De Mauduit, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of substrate nature on the microstructure of LPCVD silicon films

    New search for: Caussat, B.
    New search for: Couderc, J. P.
    New search for: Scheid, E.
    New search for: Bourgerette, C.
    New search for: De Mauduit, B.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Influence of substrate nature on the microstructure of LPCVD silicon films

    Contributors:

    Caussat, B. (author) / Couderc, J. P. (author) / Scheid, E. (author) / Bourgerette, C. (author) / De Mauduit, B. (author)

    Published in:

    JOURNAL OF MATERIALS SCIENCE LETTERS ; 17 ; 1899-1902

    Publication date:

    1998-01-01

    Size:

    4 pages

    ISSN:

    0261-8028

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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