Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Influence of substrate nature on the microstructure of LPCVD silicon films
Influence of substrate nature on the microstructure of LPCVD silicon films
Influence of substrate nature on the microstructure of LPCVD silicon films
Caussat, B. (Autor:in) / Couderc, J. P. (Autor:in) / Scheid, E. (Autor:in) / Bourgerette, C. (Autor:in) / De Mauduit, B. (Autor:in)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 17 ; 1899-1902
01.01.1998
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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